Poly- und monokristalline Werkstoffe / Materialien, Targets
Sapphire wafer 2", 3", 4", 6", 7", 8"
Single crystal SiC wafer
Single crystal Si3N4 wafer
Single crystal MgO
Single crystal ZrO2
LaAlO3 Substrate
Quarzglas / Fused silica wafer,
Borsilikatglas, Siliziumwafer, ZnO, ZnS Gläser
AlN Substrate
Saphir-Substrat 2", 4", 6", 8"
Saphir-Wafer, epi polished, C-Plane